HKUST unveils first deep-UV microLED chips for advanced photolithography
Sydney, Australia (SPX) Dec 31, 2024
Researchers at the Hong Kong University of Science and Technology (HKUST) have developed a pioneering deep-ultraviolet (UVC) microLED display array for lithography machines, marking a significant advance in semiconductor manufacturing. This technology reduces costs and enhances the efficiency of maskless photolithography by providing adequate light output power density for faster photoresist fil
Researchers at the Hong Kong University of Science and Technology (HKUST) have developed a pioneering deep-ultraviolet (UVC) microLED display array for lithography machines, marking a significant advance in semiconductor manufacturing. This technology reduces costs and enhances the efficiency of maskless photolithography by providing adequate light output power density for faster photoresist fil